TīmeklisDescription: The LamTCP 9600SE is intended to etch aluminum metal and TiW layers with highly vertical sidewalls suitable for 0.35 um line width. The plasma is a medium-‐high density transformer coupled plasma, similar to ICP sources, allowing separate control of coil (top electrode} power and platen (lower electrode) power. TīmeklisThe 9600 style has same electrical characteristics with superior anodisation and lifetime. They replace the old OEM ESC designs including; 4520, 4520XL, Excelan
LAM TCP 9600SE - Wotol
Tīmeklis• Equipment Platform – Lam Research TCP-9600 • Process – Metal Etch & Resist Strip/Ash • Process Chemistry – Cl 2, BCl 3, Water Vapor • Cleaning Chemistry – O 2 plasma (cleans ash deposits after every wafer) • Seal Location – custom seal for slit valve opening . Case Report # 6302 - PM Cycle Extended 3X! ... TīmeklisTHE METAL ETCH PROCESS There are several steps in the manufacture of semiconductors. This project focused on an Al-stack etch process performed on the commercially available Lam 9600 plasma etch tool. The goal of this process is to etch the TiN/Al - 0.5% Cu/TiN/oxide stack with an inductively coupled BCl 3/Cl 2plasma. the italian film
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Tīmeklis2024. gada 16. jūn. · Lam 9600 configuration information： 1.configured 8" wafer. 2.TCP Etch source for metal etching. 3.DSQ Module for resist strip. 4.ESC with He … TīmeklisDescription. LAM TCP9600. LAM RESEARCH 9600 Etcher, 8″, Turbo upgraded, TAC Type, VAT Valves & Controllers. Please contact us if you are interested in the LAM TCP9600. We do not own the items. These items are only for end user. They are subject to prior sales without notice. First come, first serviced. Appreciate your time. TīmeklisLampoly is a Transformer Coupled Plasma (TCP) etcher, generates a uniform, high density plasma for selective etching of silicon and polysilicon. It has two independent 13.56 MHz RF power supplies which deliver high and low power to the upper and lower electrodes, respectively. A high density discharge is generated by the higher-power … the italian fish club liverpool